Kratos AxisUltraDLD

This system is a state-of-the-art multitechnique surface analysis tool. The system measures the chemical composition and bonding of a surface, and can also perform depth profiles which look at the composition below the surface to limited depths. The system has been acquired through generous funding from an NSF Chemistry Research Instrumentation grant (CHE-0443657) and matching funds from the University of Utah Office of the Vice-president for Research.

Instrument Status

• Last updated 17:35 on 07/30/2009
• The XPS is UP, BUT the Monochromatic Al X-ray source is DOWN due to a failed filament.
• Base Pressure is mid to upper 10^-10 Torr region after an idle weekend
• All X-ray sources are functioning
• The FEG Auger gun is operational and supplying good beam current
• All operational modes (imaging, spectroscopy) are working
• Prof. Rieth is available to opearte the system
• Contact Prof. Loren Rieth to schedule an appointment
  • Email: lwr2 at utah dot edu
  • Ph: (801) 585-9535

Techniques Available:

X-ray Photoelectron Spectroscopy (XPS) and Imaging XPS

• Monochromatic X-ray source Al and Ag
• Achromatic X-ray source Al and Mg
• Small spot analysis to 15 microns
• Angle-resolved XPS

Auger Electron Spectroscopy (AES)

• Field-emission electron source
• 100 nm spot size
• Scanning electron microscopy (SEM)
• Scanning Auger microscopy (SAM)

Ion Scattering Spectroscopy (ISS / LEIS)

• He ion beam source
• Bipolar Hemispherical analyzer
• Probes the top monolayer

Depth Profiling

• Ar ion beam

Electron and Ion Dispersion

• Combined Hemispherical Analyzer and Spherical Mirror Analyzer
• Microchannel plate electron multiplier
• Delay-line detector array

Vacuum/Gas Analysis

• MKS Quadrupole Mass Spectrometer
• Located in the Sample Transfer Chamber (STC)

Sample Control and Requirements

• Positioning in X, Y, and Z by Automated manipulator
• Rotation on manipulator axis for Angle Resovled
• Temperature control from 77 K (LN₂) to 600 K (in situ heating)
• Azimuthal rotation for precision depth profiles
• Non-outgassing solid material
• Ultrahigh vacuum compatible
• Sample size of 1 x 1 cm²

CasaXPS Software:

• Download CasaXPS 2.3.14
• Contact Loren Rieth for the university's site license
• The zip file contains the executable together with default library (based on Scofield cross-sections), HTML help manual and configuration files (~25Mb)
• The Kratos element library in CasaXPS format is on the web page www.casaxps.com/kratos