The P-10/20 is a stylus profilometer, which uses a sharp stylus (2 µm tip radius) to quantitatively measure surface topography. The stylus is held at a fixed position, and the sample is scanned on a precision translation stage to make measurements. This system is very commonly used for measuring the thickness of thin films (using a patterned step), wafer bow for film stress analysis, and for quantitative surface roughness across large areas. The system is capable of 3-D surface imaging.
