Zygo NewView 5032
Acquired through University Vice-President support in conjunction with a major contribution from the Zygo Corporation, this instrument quantitatively measures surface topography of a sample using white light optical interference. This yields a non-contact and very rapid method to acquire 3-D surface data over the field-of-view for the objective lens used. Common applications include surface roughness quantification, MEMS inspection, MEMS device characterization, and etch inspection.
Instrument Status
- Last updated 17:30 on 09/29/2006
- The Zygo is currently UP.
- The repaired 20x objective has arrived on 08/16/2006 and works well
- The 5x objective has arrived and is installed.
- The purchase is a joint venture between Prof. Chandran, Prof. Solzbacher, and the Surface Lab.
- Many thanks to these professors for their community participation!
Instrument Capabilities
Objectives currently available
- Motorized objective turret
- 20x (Field-of-View: 350 x 260 µm2)
- Working Distance: 4.7 mm
- Lateral Resolution: 0.88 µm
- System Zoom (0.4 to 2x objective)
Objectives avaible from Zygo
- 1x 2x, 5x, 10x, 20x, 50x, 100x
- Long working distance objectives are available for many magnifications
Topography measurement range
- 150 µm vertical range with Angstrom resolution (faster)
- 5 mm vertical range with nm resolution (slower)
Sample Stage
- Automated sample stage
- Automated field stiching (links arrays of multiple images)
- Sample translation 6" total in X and Y
- Tip/Tilt 8° total in Tip and Tilt
Software Capabilities
- MetroPro 8.1.5
- Analysis applications for surface roughness, step height, dimensional analysis, etc
- Offline version of software available to lab users
