Baseline Semiconductor Device Processing Technology

Description
Students learn to design, build and test performance of working CMOS devices. All of this is done using in-house equipment.

Implications
Semiconductor device process technology forms the basis of all silicon-based microsystems.

Nanometer-scale thin film deposition has been commercialized for ~25 years. Photolithographic techniques in the past few years have enabled volume semiconductor manufacturers to pattern lateral features in the tens-of-nm scale.

Research Group Contacts
Prof. Mark S. Miller, instructor for yearlong sequence ECE/MSE 5211 & 5212

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