Harsh environment MEMS materials development

Description
Various projects for development and improvement of harsh environment compatible materials for MEMS/Nano applications (e.g. for high temperatures and aggressive gas and fluid media)

Implications
develop a technology toolbox for harsh environment MEMS compatible with conventional micromachining technology

develop a proper understanding of physics and chemistry of failure mechanisms of MEMS in aggressive environments

Research Group Contacts
F. Solzbacher + various:

SiC: G. Mueller (EADS, Munich)

Metallization (K. Gottfried FhG IZM Chemnitz)

Metal oxides: (T. Doll, IMM, Mainz, E. Wagner, FhG IMT, Freiburg)

NEXT nano research application: