Polysilicon Gate MOSFETs From Heterogeneous Microsystem

Description
Many microsystem device technologies underpin major industries such as computer chips and fiberoptic switching. New devices and systems continue to be invented and developed, including microelectronics, micro electromechanical systems (MEMS), microfuidic devices, integrated optical devices, and chemical and biological sensors.

Implications
The expected evolutionary trend is for several diverse technologies to be integrated onto a single chip, giving a "heterogeneous microsystem". In this course students establish and develop local versions of microsystems technologies.

Research Group
Included in the Technology Library at http://www.microfab.utah.edu

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